- We will send in 10–14 business days.
/images/books/10493526/9781499211931.jpg)
- Author: U S Department of Commerce
- Publisher: CreateSpace Independent Publishing Platform
- Year: 2014
- Pages: 254
- ISBN-10: 1499211937
- ISBN-13: 9781499211931
- Format: 21.6 x 28 x 1.4 cm, softcover
- Language: English
- SAVE -10% with code: EXTRA
Reviews
Description
The Microelectromechanical Systems (MEMS) 5-in-1 is a reference device sold as a NIST Reference Material (RM) that contains MEMS test structures on a test chip. The two RM chips (8096 and 8097) provide for both dimensional and material property measurements. RM 8096 was fabricated on a multiuser 1.5 m complementary metal oxide semiconductor (CMOS) process followed by a bulkmicromachining etch. Material properties of the composite oxide layer are reported on the RM Report of Investigation and described within this guide.3 RM 8097 was fabricated using a polysilicon multi-user surface-micromachining MEMS process with a backside etch. The material properties of the first or second polysilicon layer are reported on the RM Report of Investigation and described within this guide.
EXTRA 10 % discount with code: EXTRA
The promotion ends in 20d.08:02:43
The discount code is valid when purchasing from 10 €. Discounts do not stack.
- Author: U S Department of Commerce
- Publisher: CreateSpace Independent Publishing Platform
- Year: 2014
- Pages: 254
- ISBN-10: 1499211937
- ISBN-13: 9781499211931
- Format: 21.6 x 28 x 1.4 cm, softcover
- Language: English English
The Microelectromechanical Systems (MEMS) 5-in-1 is a reference device sold as a NIST Reference Material (RM) that contains MEMS test structures on a test chip. The two RM chips (8096 and 8097) provide for both dimensional and material property measurements. RM 8096 was fabricated on a multiuser 1.5 m complementary metal oxide semiconductor (CMOS) process followed by a bulkmicromachining etch. Material properties of the composite oxide layer are reported on the RM Report of Investigation and described within this guide.3 RM 8097 was fabricated using a polysilicon multi-user surface-micromachining MEMS process with a backside etch. The material properties of the first or second polysilicon layer are reported on the RM Report of Investigation and described within this guide.
Reviews