- We will send in 10–14 business days.
/images/books/3011974/9780306408632.jpg)
- Author: Ivor Brodie
- Publisher: Springer
- ISBN-10: 0306408635
- ISBN-13: 9780306408632
- Format: 15.6 x 23.4 x 2.9 cm, hardcover
- Language: English
- SAVE -10% with code: EXTRA
Reviews
Description
The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite the relatively small size of our research activity. We have frequently been asked to deliver seminars or provide reviews on various aspects of micro- fabrication. These activities made us aware of the need for a comprehensive overview of the physics of microfabrication. We hope that this book will fill that need.
EXTRA 10 % discount with code: EXTRA
The promotion ends in 20d.22:55:33
The discount code is valid when purchasing from 10 €. Discounts do not stack.
- Author: Ivor Brodie
- Publisher: Springer
- ISBN-10: 0306408635
- ISBN-13: 9780306408632
- Format: 15.6 x 23.4 x 2.9 cm, hardcover
- Language: English English
The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite the relatively small size of our research activity. We have frequently been asked to deliver seminars or provide reviews on various aspects of micro- fabrication. These activities made us aware of the need for a comprehensive overview of the physics of microfabrication. We hope that this book will fill that need.
Reviews