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- Author: Alexei Ivanov
- Publisher: Springer Vieweg
- Year: 2017
- ISBN-10: 3658192372
- ISBN-13: 9783658192372
- Format: 14.8 x 21 x 1.8 cm, minkšti viršeliai
- Language: English
- SAVE -10% with code: EXTRA
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Description
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.
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- Author: Alexei Ivanov
- Publisher: Springer Vieweg
- Year: 2017
- ISBN-10: 3658192372
- ISBN-13: 9783658192372
- Format: 14.8 x 21 x 1.8 cm, minkšti viršeliai
- Language: English English
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.
Reviews