525,05 €
583,39 €
-10% with code: EXTRA
Glow Discharge Processes
Glow Discharge Processes
525,05
583,39 €
  • We will send in 10–14 business days.
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.
583.39
  • Publisher:
  • ISBN-10: 047107828X
  • ISBN-13: 9780471078289
  • Format: 15.7 x 24.6 x 3.1 cm, kieti viršeliai
  • Language: English
  • SAVE -10% with code: EXTRA

Glow Discharge Processes (e-book) (used book) | Chapman | bookbook.eu

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Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

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  • Author: Chapman
  • Publisher:
  • ISBN-10: 047107828X
  • ISBN-13: 9780471078289
  • Format: 15.7 x 24.6 x 3.1 cm, kieti viršeliai
  • Language: English English

Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

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