- We will send in 10–14 business days.
/images/books/7107183/9781249595168.jpg)
- Author: Elizabeth A Chitwood
- Publisher: BiblioScholar
- ISBN-10: 1249595169
- ISBN-13: 9781249595168
- Format: 18.9 x 24.6 x 0.4 cm, minkšti viršeliai
- Language: English
- SAVE -10% with code: EXTRA
Electrical Activation Studies of Silicon Implanted Alxga1-Xn and Coimplanted Gan (e-book) (used book) | bookbook.eu
Reviews
Description
A comprehensive study of the electrical activation of silicon implanted AlxGa1-xN was performed as a function ion dose, anneal temperature, and aluminum mole fraction. Also, GaN coimplanted with silicon and nitrogen was investigated. Room temperature Hall effect measurements were used to determine carrier concentration and mobility. All the samples had a 500 Ã encapsulant of AlN, and were implanted at room temperature with 200 keV silicon ions at doses ranging from 1x1013 to 1x1015 cm-2. The GaN was also implanted with nitrogen under the same conditions in doses of 9x1012 to 9x1014 cm-2, respectively. The samples were annealed at temperatures ranging from 1200 to 1350 oC for 30 to 120 seconds in a flowing nitrogen environment.
EXTRA 10 % discount with code: EXTRA
The promotion ends in 23d.18:07:52
The discount code is valid when purchasing from 10 €. Discounts do not stack.
- Author: Elizabeth A Chitwood
- Publisher: BiblioScholar
- ISBN-10: 1249595169
- ISBN-13: 9781249595168
- Format: 18.9 x 24.6 x 0.4 cm, minkšti viršeliai
- Language: English English
A comprehensive study of the electrical activation of silicon implanted AlxGa1-xN was performed as a function ion dose, anneal temperature, and aluminum mole fraction. Also, GaN coimplanted with silicon and nitrogen was investigated. Room temperature Hall effect measurements were used to determine carrier concentration and mobility. All the samples had a 500 Ã encapsulant of AlN, and were implanted at room temperature with 200 keV silicon ions at doses ranging from 1x1013 to 1x1015 cm-2. The GaN was also implanted with nitrogen under the same conditions in doses of 9x1012 to 9x1014 cm-2, respectively. The samples were annealed at temperatures ranging from 1200 to 1350 oC for 30 to 120 seconds in a flowing nitrogen environment.
Reviews